Effect of PyC Inner Coating on Preparation of 3C-SiC Coating on Quartz Glass by Chemical Vapor Reaction

The cubic polycrystal of SiC (3C-SiC) coating on the quartz glass (QG) surface was successfully prepared via a two-step chemical vapor deposition (CVD) by introducing thin PyC as buffer layer. Through combining intake system CVD and SiC, SiC/PyC composite can be in-situ QG without halfway in-and-out chamber. results showed that possesses highly uniform, dense, continuous features, while pure exhibits many cracks, implying internal stress between relieved adding coating. average hardness SiC/PyC/QG is measured to 46.8 GPa, its calculated modulus 416.3 GPa using nanoindentation technique. Compared QG, friction coefficient slightly increased 1.47 vs. 1.45. Moreover, displays excellent anti-acid corrosion in 5%HF 5%HCl mixed solution with weight loss about 33% lower than after 8 h acid test at 80°C.